Download e-book for kindle: X-Ray Metrology in Semiconductor Manufacturing by D. Keith Bowen,Brian K. Tanner

By D. Keith Bowen,Brian K. Tanner

The scales interested by sleek semiconductor production and microelectronics proceed to plunge downward. powerful and exact characterization of fabrics with thicknesses less than a number of nanometers might be accomplished utilizing x-rays. whereas many books can be found at the thought at the back of x-ray metrology (XRM), X-Ray Metrology in Semiconductor production is the 1st e-book to target the sensible features of the know-how and its software in gadget fabrication and fixing new fabrics problems.

Following a normal assessment of the sphere, the 1st portion of the ebook is geared up by way of software and descriptions the ideas which are most fitted to every. the subsequent part delves into the suggestions and conception at the back of the purposes, corresponding to specular x-ray reflectivity, diffraction imaging, and disorder mapping. ultimately, the 3rd part presents technological info of every approach, answering questions regularly encountered in perform. The authors offer genuine examples from the semiconductor and magnetic recording industries in addition to greater than one hundred fifty sincerely drawn figures to demonstrate the dialogue. in addition they summarize the rules and key information regarding every one technique with inset packing containers stumbled on in the course of the text.

Written via global leaders within the box, X-Ray Metrology in Semiconductor production presents actual strategies with a spotlight on accuracy, repeatability, and throughput.

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X-Ray Metrology in Semiconductor Manufacturing by D. Keith Bowen,Brian K. Tanner

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