By Reza Ghodssi,Pinyen Lin
MEMs fabrics and strategies guide" is a finished reference for researchers looking for new fabrics, homes of recognized fabrics, or particular approaches on hand for MEMS fabrication. The content material is separated into designated sections on "Materials" and "Processes". The huge fabric choice consultant" and a "Material Database" publications the reader throughout the collection of acceptable fabrics for the necessary activity to hand. The "Processes" part of the publication is geared up as a catalog of varied microfabrication methods, each one with a quick creation to the expertise, in addition to examples of universal makes use of in MEMs.
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Additional resources for MEMS Materials and Processes Handbook: 1 (MEMS Reference Shelf)
MEMS Materials and Processes Handbook: 1 (MEMS Reference Shelf) by Reza Ghodssi,Pinyen Lin