Chang Liu's Foundation of MEMS: International Edition PDF

By Chang Liu

For classes in Micro-Electro-Mechanical platforms (MEMS) taken via complex undergraduate scholars, starting graduate scholars, and professionals.

Foundations of MEMS is an entry-level textual content designed to systematically educate the specifics of MEMS to an interdisciplinary viewers. Liu discusses designs, fabrics, and fabrication concerns regarding the MEMS box through applying strategies from either and mechanical engineering domain names and through incorporating evolving microfabrication know-how — all in a time-efficient and methodical demeanour. A wealth of examples and difficulties solidify scholars’ knowing of summary ideas and supply considerable possibilities for training serious thinking.

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Foundation of MEMS: International Edition by Chang Liu

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